Product Description
- It is mainly used for the storage of wafer boxes in the semiconductor production process and between processes in the clean room. According to the available space in the clean room, various types of STK can be flexibly customized to maximize the space. The purification function can be realized according to customer requirements.
Product parameters
ITEM | SPECIALIFICATION |
Cleanliness | Class 100-1000 |
Temperature | 23±2℃ |
Humidity | 45±5% |
Vibration |
≤0.5G |
Load | 15Kg |
FOUP SIZE |
300MM FOUP |
Noise |
≤75DB |
Main line speed | Max:120m/min |
Rise/fall speed | Max:96m/min |
Positioning accuracy | ±0.5mm |
Retrieval/storage speed | ≤8sec |
Average speed | ≤20sec |
Port | AUTO PORT/MANUAL PORT |
Port Setting | Auto Teaching |
Top | Open/closed |
PC | 2 sets (hot standby) |
UPS | 1 set (can send signal to the host. SCS computer automatically shut down after power failure) |
Communication |
Ethernet |
Maintenance platform | Set a maintenance platform at the STK side for Crane maintenance |