Product Description



  • It is mainly used for the storage of wafer boxes in the semiconductor production process and between processes in the clean room. According to the available space in the clean room, various types of STK can be flexibly customized to maximize the space. The purification function can be realized according to customer requirements.


Product parameters

ITEM SPECIALIFICATION
Cleanliness Class 100-1000
Temperature 23±2
Humidity 45±5%
Vibration ≤0.5G
Load 15Kg
FOUP SIZE 300MM FOUP
Noise ≤75DB
Main line speed Max:120m/min
Rise/fall speed Max:96m/min
Positioning accuracy ±0.5mm
Retrieval/storage speed ≤8sec
Average speed ≤20sec
Port AUTO PORT/MANUAL PORT
Port Setting Auto Teaching
Top Open/closed
PC 2 sets (hot standby)
UPS 1 set (can send signal to the host. SCS computer automatically shut down after power failure)
Communication Ethernet
Maintenance platform Set a maintenance platform at the STK side for Crane maintenance